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Silicon Ingots
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PRINCIPAL PARAMETERS OF CZ-SILICON INGOTS
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Diameter
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2 inches, 3 inches, 4 inches, 5 inches, 5.5 inches, 6 inches, 6.5 inches
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Diameter toleranz
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minimum: +0,1 mm
standard: + 3/- 2 mm
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Type/Doped
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N-type /Phosphorus or Antimony or Arsenic doped
P-type /Boron doped
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Orientation
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(100), (111) +3o
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Resistivity
(interval of average value)
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0,002 - 50 (ohm*cm)
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Resistivity toleranz
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min.20%, standard 30%
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Radial resistivity variation
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<12% (resistivity 1 – 15 ohm*cm)
<16% (resistivity 0,002 -1 or 15 – 50 ohm*cm)
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Oxygen content
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(2 - 9)*1017 AT/CM3 (8 - 36 ppma, ST ASTM F121 - 79) - maximum
(7 - 9)*1017 AT/CM3 (28 - 36 ppma, ST ASTM F121- 79) - standard
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Carbon content
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<1*1017 AT/CM3 (2 ppma, ST ASTM F123 -83) - standard
<5*1016 AT/CM3 (1 ppma, ST ASTM F123 -83) - special
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Dislocation
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None
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